PECVD system for deposition of passivation layers silicon nitride on-wafer, Open-loading Plasma Etch and Deposition Tool, Cleanroom, Microelectronics and Microsystems Unit, CEIT(Center of Studies and Technical Research), University of Navarra, Spain. PECVD system for deposition of passivation layers silicon nitride on-wafer Open-loading Plasma Etch and Deposition Tool Cleanroom Microelectronics and Microsystems Unit CEIT Center of Studies and Technical Research University of Navarra, Donos
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