Pouring liquid nitrogen to improve the vacuum in the chamber to deposit thin films, Vacuum Coating Systems, Cleanroom, Microelectronics and Microsystems Unit, CEIT(Center of Studies and Technical Research), University of Navarra, Donostia, Spain. Pouring liquid nitrogen to improve the vacuum in the chamber to deposit thin films Vacuum Coating Systems Cleanroom Microelectronics and Microsystems Unit CEIT Center of Studies and Technical Research University of Navarra, Donostia, Gipuzkoa, Bas

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